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Sensors for displacement, distance & position Micro-Epsilon

Multi-channel capacitive measurement system capaNCDT 6500

Multi-channel capacitive measurement systemcapaNCDT 6500

Multi-channel capacitive measurement system
capaNCDT 6500

Made in Germany

Capacitive displacement sensors are designed for measurement tasks that require extremely high precision. The capaNCDT 6500 capacitive multi-channel system is ideally suited to reliable measurements down to sub-nanometre resolution. The controller offers a maximum response rate of 7.8kHz (digital, with up to four channels) or a frequency response of 8.5kHz. As well as an analog output, an EtherCAT(R) interface is also available. EtherCAT enables accurate data transmission in real time, with high speed integration into the existing measurement environment and synchronization of two systems. Set up and configuration of the capaNCDT 6500 system are carried out easily using a web browser.

  • Measuring ranges (mm): 0.05 / 0.2 / 0.5 / 0.8 / 1 / 2 / 3 / 5 / 10
  • Linearity: max. 0.01 µm
  • Resolution: max. 0.0375 nm
  • Analog output (voltage)
  • Digital interface Ethernet/EtherCAT interface
  • Modular – expandable up to 8 channels

The capaNCDT 6500 system is designed for measurements tasks that require sub-nanometre resolution. Its strengths are demonstrated particularly well in positioning tasks in the semiconductor industry and laboratory applications. Up to eight sensors can be connected via a preamplifier to the signal conditioning electronics. Due to a user-friendly web interface, the entire configuration process of controller and sensors is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options for filters, arithmetic links and other useful parameters such as triggering, measurement value storage and linearization.

DT6530 DT6510 CPM6011
DT6530C CP6001 DL6530
KSS6420 KSS6430 KSH5
KSH10 CSH1,4FL-CRg6,0 CSH1,4CH-CRg6,0
6610158.01 6610158.02 MD6-22
CSF2-CRg4.0 CSF4-CRg4.0 CSF6-CRg4.0
CSG0,5-CAm2,0 CSG1,0-CAm2,0